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Characterization of Single- and Multiple-Layer Films by X-Ray Reflectometry

Published online by Cambridge University Press:  06 March 2019

T. C. Huang  and
W. Parrish
T. C. Huang
Affiliation:
IBM Research Division, Almaden Research Center 650 Harry Road, San Jose, CA 95120-6099
W. Parrish
Affiliation:
IBM Research Division, Almaden Research Center 650 Harry Road, San Jose, CA 95120-6099
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Abstract

Precision X-ray reflectivity data were obtained with a high-resolution reflectometer equipped with a rotating anode X-ray source and Ge 220 channel monochromators (one placed before and the other after the specimen). The surfaces and buried interfaces of thin films were characterized by ieast-squares refinement of experimental data. Values of thickness, density, and/or roughness of Pt “single-layer” and Pt/Co based multiple-layer films were determined.

Type
III. Thin-Film and Surface Characterization by XRD
Information
Advances in X-Ray Analysis , Volume 35 , Issue A: First Pacific-International Congress on X-ray Analytical Methods (PICXAM). Fortieth Annual Conference on Applications of X-ray Analysis, August 7-16, 1991 , 1991 , pp. 137 - 142
Copyright
Copyright © International Centre for Diffraction Data 1991

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References

1 See, for example, papers in “Advances in Surface and Thin Film Diffraction,” MRS Symposium Proceedings, Volume 208, edited by T. C. Huang, P. J. Cohen, and D. J. Eaglesham, MRS, Pittsburgh, PA (1991); T. P. Russell, Mater. Sci. Repts. 5, 171 (1990), and references therein.Google Scholar
2. Parrish, W., Erickson, C., Huang, T.C., Hart, M., Gilles, B., and Toraya, H., MRS Symposium Proc. 208, 327 (1991).Google Scholar
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