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Application of Synchrotron and Flash X-Ray Topography to Improved Processing of Electronic Materials

Published online by Cambridge University Press:  06 March 2019

J.M. Winter Jr. ,
R.E. Green Jr.  and
K.A. Green
J.M. Winter Jr.
Affiliation:
Center for Nondestructive Evaluation The Johns Hopkins University Baltimore, Maryland, 21218, USA
R.E. Green Jr.
Affiliation:
Center for Nondestructive Evaluation The Johns Hopkins University Baltimore, Maryland, 21218, USA
K.A. Green
Affiliation:
Center for Nondestructive Evaluation The Johns Hopkins University Baltimore, Maryland, 21218, USA
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Abstract

White beam transmission topography was used to image defect structures in gallium arsenide single crystal substrates representative of those used for microwave integrated circuit fabrication. A scanning topographic camera was developed for Beamline X-19C at the National Synchrotron Light Source. Acquiring film topographs within a particular range of scan rates and x-ray fluxes was found to produce distorted images. The distortions were shown to be thermoelastic, arising from inhomogeneous deposition of thermal energy through the absorption of residual x-rays. The problem could be circumvented using faster scans with some sacrifice in spatial resolution. Real time electrooptic topographs were recorded using x-ray fluxes about one percent of those used for the film topographs. The potential for reducing the flux requirement to even lower levels which would be accessible to flash x-ray generators is considered.

Type
IV. Lattice Defects and X-Ray Topography
Information
Advances in X-Ray Analysis , Volume 35 , Issue A: First Pacific-International Congress on X-ray Analytical Methods (PICXAM). Fortieth Annual Conference on Applications of X-ray Analysis, August 7-16, 1991 , 1991 , pp. 239 - 245
Copyright
Copyright © International Centre for Diffraction Data 1991

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References

1. Winter, J.M. Jr. and Green, R.E. Jr., “Characterization of Industrially Important Materials Using XHRay Diffraction Imaging Methods”, in Nondestructive Characterization of Materials, p. Holler et al, eds. pp.771-779, Springer-Verlag, N.Y. (1989).Google Scholar
2. Winter, J.M. Jr., Green, R.E. Jr., and Corak, W.S., “White Beam synchrotron X-Ray Topography of Gallium Arsenide”, Review of Progress in Quantitative Nondestructive Evaluation, 7B, D. O. Thompson and Chimenti, D.E., eds, pp.1153-1160, Plenum, N.Y.,(1988).Google Scholar
3. Winter, J.M. Jr. and Green, E.E. Jr., “Design of a Versatile Demountable Flash X-Ray Tube for Diffraction studies”, in Proceedings of the 1989 Flash Radiography Topical Conference, E. A. Webster and A. M. Kennedy, eds, pp. 70-81, Am. Defense Preparedness Assn., Arlington, VA., (1989).Google Scholar