Hostname: page-component-78c5997874-4rdpn Total loading time: 0 Render date: 2024-11-19T07:10:38.327Z Has data issue: false hasContentIssue false
  • English
  • Français

X-Ray Fluorescence Analysis of Multi-Layer Thin Films

Published online by Cambridge University Press:  06 March 2019

T. C. Huang  and
W. Parrish
T. C. Huang
Affiliation:
IBM Almaden Research Center, K31/80 650 Harry Road San Jose, CA 95120-6099
W. Parrish
Affiliation:
IBM Almaden Research Center, K31/80 650 Harry Road San Jose, CA 95120-6099
Get access

Abstract

The characterization of multi-layer thin films by X-ray fluorescence using the fundamental parameter method and the LAMA-III program is described. Analyses of a double-layer FeMn/NiFe and two triple-layer NiFe/Cu/Cr and Cr/Cu/NiFe specimens show that the complex inter-layer absorption and secondary fluorescence effects were properly corrected. The compositions and thicknesses of all layers agreed to ±2% with corresponding single-layer films, a precisian comparable with bulk and single-layer thin film analyses.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 29: Thirty-Fourth Annual Conference on Applications of X-ray Analysis, August 5-9, 1985 , 1985 , pp. 395 - 402
Copyright
Copyright © International Centre for Diffraction Data 1985

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Huang, T.C. and Parrish, W., Adv. X-Ray Anal. 22: 43 (1979).Google Scholar
2. Laguitton, D. and Parrish, W., Anal. Cheia. 49: 1152 (1977).Google Scholar
3. Criss, J.W. and Birks, L.S., Anal. Chem. 40: 1080 (1968).Google Scholar
4. Laguitton, D. and Mantler, M., Adv. X-Ray Anal. 20: 515 (1977).Google Scholar
5. Huang, T.C., X-Ray Spectrom. 10:28 (1981).Google Scholar
6. Mantler, M., Adv. X-Ray Anal. 27: 433 (1984). Google Scholar
7. Mantler, M., in preparation.Google Scholar