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The Use of a Conventional Powder Diffractometer for Thin-Film Thickness Determination From Reflectivity DATA

Published online by Cambridge University Press:  06 March 2019

T. C. Huang ,
R. Gilles  and
G. Will
T. C. Huang
Affiliation:
Mineralogical Institute, University Bonn Poppelsdorfer Schloss, 5300 Bonn 1, Germany
R. Gilles
Affiliation:
Mineralogical Institute, University Bonn Poppelsdorfer Schloss, 5300 Bonn 1, Germany
G. Will
Affiliation:
Mineralogical Institute, University Bonn Poppelsdorfer Schloss, 5300 Bonn 1, Germany
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Abstract

Precise thin-film thicknesses have been obtained from X-ray specular and off-specular reflectivity data collected with a conventional powder diffractometer. An analysis of the specular reflectivity curve for a 565.9-Å thick pt film showed the results agreed with those determined previously from high-resolution reflectometer data to within 6.6 Å or 1.2%. An analysis of the off-specular reflectivity curves which have well-defined interference fringes showed that the results were insensitive to the surface alignment. Values of Pt thickness for the off-specular reflectivity curves agreed with that of the specular reflectivity curve to within 6.2 Å or 1.1%. The insensitivity in film-surface misalignment makes conventional powder diffractometer attractive for film-thickness determination and opens this techniques to many laboratories.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 37: Forty-Second Annual Conference on Applications of X-ray Analysis, August 2-6, 1993 , 1993 , pp. 183 - 188
Copyright
Copyright © International Centre for Diffraction Data 1993

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