Hostname: page-component-78c5997874-4rdpn Total loading time: 0 Render date: 2024-11-05T13:17:16.682Z Has data issue: false hasContentIssue false
  • English
  • Français

The Study of Some Peculiar Phenomena in Ultra-Soft X-ray Measurements Using Synthetic Multilayer Crystals

Published online by Cambridge University Press:  06 March 2019

H. Kobayashi ,
K. Toda ,
H. Kohno ,
T. Arai  and
R. Wilson
H. Kobayashi
Affiliation:
Rigaku Industrial Corporation Osaka, Japan
K. Toda
Affiliation:
Rigaku Industrial Corporation Osaka, Japan
H. Kohno
Affiliation:
Rigaku Industrial Corporation Osaka, Japan
T. Arai
Affiliation:
Rigaku Industrial Corporation Osaka, Japan
R. Wilson
Affiliation:
Rigaku/USA, Inc. Danvers, MA
Get access

Extract

Several interesting phenomena involving ultra-soft X-rays and synthetic multilayer crystals were studied as a result of the on-going process of improving the Rigaku Mode] 3630 Wafer Analyzer for the measurement of BPSG (1000-2500 Å) and other thin films.1-3 These phenomena can be divided into four categories; “ghost” peaks, diffraction from the substrate, fluorescence from the multilayer and higher order lines from the multilayer. Each of these is a potential snurce nf error in the measurement of ultra-soft X-rays, Fortunately, as will be shown, each can be readily dealt with.

Type
IV. New Developments in X-Ray Sources, Instrumentation and Techniques
Information
Advances in X-Ray Analysis , Volume 38: Forty-third Annual Conference on Applications of X-ray Analysis , 1994 , pp. 307 - 312
Copyright
Copyright © International Centre for Diffraction Data 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Kohno, H., Arai, T., Araki, Y. and Wilson, R., “High Accuracy Analysis of BPSG Thin Films on Silicon Wafers by X-Ray Wafer Analyzer”, Advances in X-Ray Analysis, vol. 37, p. 229, 1994.Google Scholar
2. Kohno, H., and Arai, T., “Instrumeiiations and Applications for the Soft and Ultra-soft Measurements”, Advances in X-Ray Analysis vol. 36, p. 59–64, 1993.Google Scholar
3. Huang, T.C., Fung, A., and White, R. L., “Recent Measurements of Long Wavelength X-Rays Using Synthetic Multilayers”, X-Ray Spectrometry, vol. 18, p. 53–56, 1989.Google Scholar