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Structural Characterization of Thin Films by X-Ray Diffraction and Reflectivity

Published online by Cambridge University Press:  06 March 2019

Daniel T. Brower ,
Brian S. Medower  and
Ting C. Huang
Daniel T. Brower
Affiliation:
Optex Communications Corporation, 2 Research Court, Rockville, MD 20850
Brian S. Medower
Affiliation:
Optex Communications Corporation, 2 Research Court, Rockville, MD 20850
Ting C. Huang
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120
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Abstract

X-ray polycrystalline diffraction was used to track progress toward improving the structural properties of SrS:(Eu,Sm) thin films. These thin films are used as the active layer of the ETOM (Electron Trapping Optical Memory) media. In this study conventional x-ray diffraction and x-ray reflectivity were used to evaluate the effect of two deposition parameters on film structures. Line broadening analysis performed using the Warren-Averbach technique showed the beneficial effects of a hydrogen sulfide reactive atmosphere and the RF magnetron sputtering technique on crystallite size and microstrain. A factor of five improvement in crystallite size and a factor of two reduction in microstrain was observed. Film thickness, density, and interfacial and surface roughnesses were determined for two SrS thin films. The sin2Ψ technique was used to determine the in-plane biaxial stress for two films prepared by different deposition techniques. These films exhibit inhomogeneous stress states with an average stress of less than IMPa.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 39: Forty-Fourth Annual Conference on Applications of X-ray Analysis, July 31 - August 4, 1995 , 1995 , pp. 615 - 625
Copyright
Copyright © International Centre for Diffraction Data 1995

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References

1 Brower, D., Earman, A., and Chaffin, M. H., in Proceedings of the Goddard Conference on Mass Storage Systems and Technologies, ed. Kobler, B., Berbert, J., and Hariharan (1992).Google Scholar
2 Movchan, B. A. and Demchishin, A. V., Phys. Met. Metallogr. 28, 83 (1969).Google Scholar
3 Stokes, A. R., Proc. Phys. Soc. London 61, 382 (1948).Google Scholar
4 Warren, B. E., Progress in Metal Physics, 8, ed. Chalmers, B. and King, R., London; Pergamon Press, 146 (1959),Google Scholar
5 Warren, B. E., X-ray Diffraction, Reading, MA, Addison-Wesley (1969).Google Scholar
6 Balzar, D., J. Appl. Cryst. 25, 559 (1992).Google Scholar
7 Bennedetti, A., Fagherazzi, G., Enzo, S., and Battagliarin, M., J. Appl. Crys 21, 543 (1988).Google Scholar
8 Noyan, I. C. and Cohen, J. B., Residual Stress, New York, NY, Springer- Verlag (1987).Google Scholar
9 Klug, H. and Alexander, L., X-ray Diffraction Procedures, 2nd ed., New York, NY, John Wiley and Sons, 760 (1974).Google Scholar
10 Kiessig, H., Ann. Phys, (Leipzig) 10, 769 (1931).Google Scholar
11 Parratt, L. G., Phys. Rev., 95, 359 (1954).Google Scholar
12 Meyerheim, H. L. and Goebel, H. E., Thin Solid Film., 199, 343 (1991).Google Scholar
13 Huang, T. C., Nozieres, J. P., Speriosu, V. S., Lefakis, H., and Gurney, B., Appl. Phys. Lett., 60, 1573 (1992).Google Scholar
14 Segmüller, A., Thin Sohd Film., 18, 287 (1973).Google Scholar
15 Lengeler, B., Adv. X-Ray Anal 35A, A (1992).Google Scholar
16 Huang, T. C., Gilles, R., and Will, G., Thin Solid Film., 230, 99 (1993).Google Scholar
17 Huang, T. C. and Parrish, W., Adv. X-Ray Anal 35A, A (1992).Google Scholar
18 Segmüller, A., AIP Conf. Proc., 53, 78 (1979).Google Scholar
19 Enzo, S. and Parrish, W., Adv. X-ray Anal., 27, 37 (1984).Google Scholar
20 Soltani, P., ‘Mechanical properties of alkaline-earth sulfide thin films', PhD Thesis, University of Maryland-College Park (1994).Google Scholar
21 NAF11, modified for PC by the Mineralogical Institute of the University of BonnGoogle Scholar