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Stresses in Thin Films

Published online by Cambridge University Press:  06 March 2019

Jerome B. Cohen
Jerome B. Cohen*
Affiliation:
Department of Materials Science and Engineering, Robert R. McCormick School of Engineering and Applied Science, The Technological Institute, Northwestern University, Evanston, IL 60208
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Extract

While any subject associated with films evokes immediate thoughts about solid-state devices, there are other much more mature areas where it is important, such as coatings, and yet work on this entire subject is only in its infancy. Residual stresses are not only important because of their well-known effect on corrosion and mechanical properties, they can also lead to other severe problems. For example, it is now believed that stress gradients can lead to void formation and subsequent failure in metallization in electronic devices. Thus, it is not only the level of stress that can be important, but gradients across a surface of a thin stripe, or through the thickness.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 33: Thirty-Eighth Annual Conference on Applications of X-ray Analysis, July 31 - August 4, 1989 , 1989 , pp. 25 - 32
Copyright
Copyright © International Centre for Diffraction Data 1989

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