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Simultaneous Determination of the Thickness and Composition of Thin Film Samples Using Fundamental Parameters

Published online by Cambridge University Press:  06 March 2019

James E. Willis
James E. Willis*
Affiliation:
Tracor Xray 345 E. Middlefield Road Mountain View, CA 94043
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Extract

The use of empirical analysis techniques for the simultaneous determination of the thickness and composition of thin film samples usually requires a suite of well characterized similar type standards. While this may be adequate for a quality control application, this requirement severely limits the utility of X-ray fluorescence in the analysis of thin films in a service lab or research environment.

The use of fundamental parameters in the analysis of thin films allows the simultaneous determination of the thickness and composition of single and multiple layer thin film unknown samples without the use of similar type standards.

Type
II. Characterization of Thin Films by XRD and XRF
Information
Advances in X-Ray Analysis , Volume 31: Thirty-Sixth Annual Conference on Applications of X-ray Analysis, August 3-7, 1987 , 1987 , pp. 175 - 180
Copyright
Copyright © International Centre for Diffraction Data 1987

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References

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