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Secondary Ion Mass Spectrcmetry and Related Techniques

Published online by Cambridge University Press:  06 March 2019

Sally Asher
Sally Asher*
Affiliation:
Solar Energy Research Institute 1617 Cole Blvd. Golden, CO 80401
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Secondary ion mass spectrometry (SIMS) Is a well established technique for the microcharacterization of solid samples. SIMS is able to detect all the elements in the periodic table, from H to U, and their isotopes. It Is unique among the common surface analytical techniques in its ability to detect H directly. SIMS has high sensitivity, ppm to ppb, for most elements. It has good depth and lateral resolution, 5-10nm and 1-2µ, respectively. Sample preparation is minimal and almost any sample oan be accommodated. In addition, molecular SIMS offers the chance to obtain chemical information about the sample. As a result of these features, SIMS has found applications in many fields; The techniques related to SIMS that will be described at the end of this paper differ primarily in their methods of generating secondary ions. This leads to differences in the information obtained and the types of samples which can be analyzed. This paper will be a brief introduction to the field of SIMS. Several reviews and a recently published text are available in the literature.

Type
I. Microbeam Techniques and Imaging Methods for Materials Characterization
Information
Advances in X-Ray Analysis , Volume 31: Thirty-Sixth Annual Conference on Applications of X-ray Analysis, August 3-7, 1987 , 1987 , pp. 53 - 58
Copyright
Copyright © International Centre for Diffraction Data 1987

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References

1. Benninghoven, A., ed., “Ion Formation From Organic Solids,” Springer, Berlin (1983).Google Scholar
2. McHugh, J.A., Secondary Ion Mass Spectrometry, in: “Methods of Surface Analysis,” Csanderna, A.W., ed., Elsevier, Amsterdam (1975).Google Scholar
3. Morrison, G.H., Slodzlan, G., “Ion Microscopy,” Anal. Chem., 47: 932A, (1975)Google Scholar
4. Werner, H.W., “Quantitative Secondary Ion Mass Spectrometry: A Review,” Surf. Interface Anal. 2: 56 (1980),Google Scholar
5. Benninghoven, A., Rudenauer, F.G., Werner, H.W., “Secondary Ion Mass Spectrometry,” John Wiley and Sons, NY (1987).Google Scholar
6. Williams, P., “On Mechanisms of Sputtered Ion Emission,” Appl. Surf. Sci. 13; 241 (1982).Google Scholar
7. Williams, P., “Secondary Ion Mass Spectrometry,” Ann. Rev. Mater. Sci. 15:51, 7 (1985).Google Scholar
8. Turner, N.H., Colton, R.J., “Surface Analysis: X-Ray Photoelectror. Spectroscopy, Auger Electron Spectroscopy, and Secondary Ion Mass Spectrometry,’ Anal. Chem. 54: 293R (1982).Google Scholar
9. Turner, N.H., Dunlap, B.I., Colton, R.J., “Surface Analysis: X-Ray Photoelectron Spectroscopy, Auger Electron Spectroscopy, and Secondary Ion Mass Spectrometry,” Anal. Chem. 56:373R (1984).Google Scholar
10. Shimizu, M., Hart, S.R., “Applications of the Ion Microprobe to Geochemistry and Cosmocliemistry,” Ann. Rev. Earth Planet. Sci. 10: 403 (1982).Google Scholar
11. Burns, M.S., “Applications of Secondary Ion Mass Spectrometry (SIMS) in Biological Research: A Review,” J. Microsc. 127:237 (1982)Google Scholar
12. Rudenauer, F.G., “Spatially Multidimensional SIMS Analysis,” Surf. Interface Anal. 6: 132 (1984).Google Scholar
13. Zinner, E., “Depth Profiling By Secondary Ion Mass Spectrometry, Scanning 3: 57 (1980).Google Scholar
14. Benninghoven, A., Evan, C.A. , Storms, H., Powell, R.A.,’ Werner, H.W., eds. “Secondary Ion Mass Spectrometry SIMS II,” Springer, Berlin (1980).Google Scholar
15. Benninghoven, A., Giber, J., Lasslo, J., Riedel, M., Werner, H.W., eds., “Secondary Ion Mass Spectrometry SIMS I.I.” Springer, Berlin (1982)Google Scholar
16. Benninghoven, A., Okano, J., Shimizu, R., Werner, H.W., eds., “Secondary Ion Mass Spectrometry SIMS IV,” Springer, Berlin (1984).Google Scholar
17. Benninghoven, A., Colton, R.J., Simons, D.S., Werner, H.W., eds., “Secondary Ion Mas3 Spectrometry SIMS.V.” Springer, Berlin (1986).Google Scholar
18. Conzemius, R.J., Capellen, J.M., “A Review of the Applications to Solids of tile Laser Ion'Souree in Mass Spectrometry,” Int. J. Mass Spec. Ion Phys. 34: 197 (1980).Google Scholar
19. Kaufrcann, R., Wieser, P., Laser Microprobe Mass Analysis in Particle Analysis, in: “Particle Characterization in Technology,” Beddow, J.K., ed., CRC Press, Boca Raton (1984).Google Scholar
20. Sundqvist, B., MacFarlane, R.D.,,Z52Cf-Plasma Desorbtion Maas Spectrometry,” Mass Speo. Rev. 4: 421 (1985).Google Scholar
21. Barber, M, Bordoli, R.J., Elliott, G.J., Sedgwick, R.D., Tyler, A.N., “Fast Atom Bombardment Mass Spectrometry,” Anal. Chem. 54:645A (1982).Google Scholar
22. Reuter, W., Post-Ionization of Sputtered Particles; A Brief Review, in: “Secondary Ion Mass Spectrometry SIMS.V.” Benninghoven, A., Colton, R.J., Simons, D.S., Werner, H.W., eds., Springer, Berlin (1986).'Google Scholar