Hostname: page-component-586b7cd67f-2plfb Total loading time: 0 Render date: 2024-11-23T12:42:44.826Z Has data issue: false hasContentIssue false
  • English
  • Français

Least-Squares Refinement of X-ray Reflectivity Data Obtained with a Conventional Powder Diffractometer

Published online by Cambridge University Press:  06 March 2019

R. Gilles ,
G. Will ,
F. Elf  and
T. C. Huang
R. Gilles
Affiliation:
Mineralogical Institute, University Bonn Poppeldorfer Schloβ, 53115 Bonn, Germany
G. Will
Affiliation:
Mineralogical Institute, University Bonn Poppeldorfer Schloβ, 53115 Bonn, Germany
F. Elf
Affiliation:
Mineralogical Institute, University Bonn Poppeldorfer Schloβ, 53115 Bonn, Germany
T. C. Huang
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road San Jose, CA 95120-6099
Get access

Abstract

Results on least-squares refinement of X-ray reflectivity data obtained with a conventional powder diffractometer are reported. A model containing an oxygen contaminated surface on Pt was used to refine experimental data for a “500-Å” Pt film on Si. Values of layer thickness, density, and roughness determined by least-squares refinement agree with those obtained from highresolution reflectivity data. The results were found to be insensitive to the film-surface alignment. An agreement of ±2.3 Å for Pt thickness, 8% for density, and 2.5 Å for roughness was obtained when the surface was aligned to within the divergence of the incident X-ray beam. The least-squares refinement method was also used to analyze two sputtered “300-Å” Pt films deposited at 4 and 20 × 10-6 Torr Ar pressure. Results showed a significant increase in Pt thickness and a decrease in density for the 20 × 10-6 film probably caused by a large amount of Ar trapped in the film.

Type
III. Applications of Diffraction to Semiconductors and Films
Information
Advances in X-Ray Analysis , Volume 38: Forty-third Annual Conference on Applications of X-ray Analysis , 1994 , pp. 145 - 150
Copyright
Copyright © International Centre for Diffraction Data 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Huang, T. C., Gilles, R. and Will, G., Adv. X-ray Anal. 37, 183–188 (1994).Google Scholar
2. Huang, T. C., Gilles, R. and Will, G., Thin Solid Films 230, 99–101 (1993).Google Scholar
3. Parrish, W., Erickson, C., Huang, T.C., Hart, M., Gilles, B. and Toraya, H., Mat. Res. Soc. Symp. Proc. 208, 327-337 (1991).Google Scholar
4. Lengeler, B., Festkorperprobleme 29, 64–73 (1989).Google Scholar
5. Huang, T. C., Toraya, H., Blanton, T. and Wu, Y., J. Appl. Cryst. 26, 180–184 (1993).Google Scholar
6. Blanton, T., Huang, T.C., Toraya, H., Hubbard, C., Robie, S., Gobel, D. H., Will, G., Gilles, R. and Raftery, T., accepted for publication in Powder Diffraction (1994).Google Scholar
7. Huang, T. C. and Parrish, W., Adv. X-Ray Anal. 35, 137–142 (1992).Google Scholar