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Instrumentation for Electron Probe Microanalysis

Published online by Cambridge University Press:  06 March 2019

David B. Wittry
David B. Wittry*
Affiliation:
Applied Research Laboratories Glendale, California
*
*Present address: University of Southern California, University Park, Los Angeles, California.
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Abstract

Since the development of the first practical electron probe microanalyzer by Castaing and Guinier in 1951, approximately 14 such instruments have been placed in operation throughout the world and at least 15 more are under construction. All of the existing instruments contain the following basic components: (1) An electron beam system, (2) a movable specimen stage, (3) a means for viewing the surface of the specimen, and (4) an X-ray analyzer. The integration of these components into a practical instrument requires certain compromises in the performance capability of the instrument. A critical evaluation of the various approaches to this problem is given and a new electron objective lens is described which results in fewer restrictions on the over-all performance. The basic design of an instrument employing this lens, which will be manufactured by the Applied Research Laboratories, is discussed.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 3: Eighth Annual Conference on Applications of X-ray Analysis, August 12-14, 1959 , 1959 , pp. 185 - 195
Copyright
Copyright © International Centre for Diffraction Data 1959

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References

1 Hillier, J., “Electron Probe Analysis Employing X-ray Spectrography.” U.S. Patent No. 2,418.029, Applied for: October, 1943, Issued: March, 1947.Google Scholar
2 Castaing, R. and Guinier, A., Proceedings of a conference on electron microscopy at Delft, 1949, Delft, 1950. Comptes rendus du premier congres international de microscopie électronique 1950. Editions de la Revue d'Optique, Paris, 1953.Google Scholar
3 Castaing, R., “Application des Sondes Electroniques a Une Méthode d'Analyse Ponctuelle Chimique et Cristallographique,” These de Doctorat, Publication ONERA, No. 55, 1951.Google Scholar
4 Castaing, R., “Recent Developments in X-ray Spectrographic Spot Analysis,” Laboratories, 1956, p. 7.Google Scholar
5 Borowskii, I. B., Symposium of problems in metallurgy, Academy of Sciences, USSR, 1953.Google Scholar
6 Borowskii, I. B. and Uyan, N. O., “A New Method for Investigating the Chemical Composition of Microvolumes,” Doklady Akad. Nauk, Vol. 106 (4) 1955.Google Scholar
7 Cosslett, V. E. and Duncumb, P., “Microanalysis by a Flying Spot X-ray Method,” Nature, Vol. 177, 1956, p. 1172.Google Scholar
8 Mulvey, T., “Improved Electron Optical System for X-ray Microanalyzer, “ Proceedings of a conference on electron microscopy at Reading, 1956. “An X-Ray Microanaîyzer of Improved Design,” Proceedings of the International Conference on Electron Microscopy, Berlin, September, 1958.Google Scholar
9 Duncumb, P. and Melford, D. A., “Design Considerations of an X-ray Scanning Microanalyzer Used Mainly for Metallurgical Applications,” Proceedings of the Second International Symposium on X-ray Microscopy and Microanalysis, Stockholm, July, 1959. (To be published.)Google Scholar
10 Franks, A., National Physical Laboratory, Teddington, England. (Private communication.)Google Scholar
11 Bloom, M., “N” Building, Imperial Chemical Industries, Ltd., Billingham Co., Durham, England. (Private communication.)Google Scholar
12 Wittry, D. B., DuMond, J. W. M., and Duwez, Pol, “An Electron Microprobe for Local Analysis by Means of X-rays,” Bull. Am. Phys. Soc, Vol. 2, 1957, p. 213. (Abstract of paper presented at the Am. Phys. Soc, meeting, Washington, May, 1957.)Google Scholar
13 Wittry, D. B., “An Electron Probe for Local Analysis by Means of X-rays,” Ph.D. Thesis, California Institute of Technology, Pasadena, California, 1957 Google Scholar
14 Birks, L. S. and Brooks, E. J., “Electron Probe Microanalyzer,” Rev. Sci. Instr., Vol. 28, 1957, p. 709.Google Scholar
15 Fisher, R. M., “Working Distance in Electron Probe Instruments,” J. Appl. Phys., Vol. 28, 1957, p. 1377. (Abstract of paper presented at the fifteenth annual meeting of the Electron Microscope Society of America, Boston, September, 1957.) “Modification, An Electron Microscope for Microprobe X-ray Spectroscopy,” Fifth Annual Symposium on Industrial Applications of X-ray Analysis, Denver, August, 1956 (unpublished).Google Scholar
16 Macres, V. G. and Ogilvie, R., Massachusetts Institute of Technology, Boston, Massachusetts (private communication).Google Scholar
17 Schwartz, C. S. and Austin, A. E., “Microbeam Analyzer at Battelle Memorial Institute,” J. Appl. Phys., Vol. 28, 1957, p. 1368. (Abstract of paper presented at the fifteenth annual meeting of the Electron Microscope Society of America, Boston, September, 1957.)Google Scholar
18 Buschmann, E. C., “A New Microemission X-ray Spectrograph— Design and Operation of the Direct Emission Curved Crystal Instrument,” Proceedings of the Sixth Annual Conference on Industrial Applications of X-ray Analysis, University of Denver, 1957.Google Scholar
19 Buschmann, E. C. and Norton, J. F., “MicroemissionX-raySpectrograph,” General Engineering Laboratory, General Electric, Report No. 57GL201, June, 1957.Google Scholar
20 Lang, A. and Riggs, F. B., Smithsonian Institution, Astrophysical Observatory, 60 Garden Street, Cambridge 38, Massachusetts. (Private communication,)Google Scholar
21 Taylor, A., Westinghouse Research Laboratories, Pittsburgh, Pennsylvania. (Private communication.)Google Scholar
22 Miller, D. C., Philips Electronics, Inc., 750 Fulton Avenue, Mount Vernon, New York. (Private communication.)Google Scholar
23 Adler, L., U.S. Department of the Interior, Geological Survey, Washington 25, D.C, (Private communication.)Google Scholar
24 Cuthill, J. R., National Bureau of Standards, Washington 25, D.C. (Private communication.)Google Scholar
25 Ogilvie, R., Advanced Metals Research Corporation,625McGrath Highway, Somerville 45, Massachusetts. (Private communication.)Google Scholar
26 Watanabe, H., Hitachi Central Research Laboratories, Kokubunji, Tokyo, Japan. (Private communication.)Google Scholar
27 Schumacher, B. W., Ontario Research Foundation, 43 Queens Park, Toronto, Ontario, Canada. (Private communication.)Google Scholar
28 Wittry, D. B., “Two Improvements in Electron Sources for Electron Probes,” Rev. Sci. Instr., Vol. 28, 1957, p. 58.Google Scholar