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Imaging Techniques for X-Ray Fluorescence and X-Ray Diffraction

Published online by Cambridge University Press:  06 March 2019

N. Gurker*
Affiliation:
Technical University Vienna, Argentinierstrasse 8, A-1040 Vienna, Austria
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Extract

Electron induced X-ray mapping together with modern SEM/EDX analysis systems has reached a high level of perfection due to established methods of beam deflection and focusing and today's standard in energy dispersive X-ray detection and data processing. X-ray analysis of specimens based on X-ray excitation (XRF/XRD) is routinely performed on comparatively large specimen areas without conserved spatial information. XRF-/XRD-imaging capabilities are not yet commonly available on standard spectrometers, since both suitable X-ray optical elements are missing and there is a large intensity loss due to the necessary primary beam collimation.

Type
II. XRF Techniques and Instrumentation
Copyright
Copyright © International Centre for Diffraction Data 1986

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