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Determination of Crystal Structure and Cation Distribution in Thin Films

Published online by Cambridge University Press:  06 March 2019

G. Will ,
T. C. Huang  and
F. Sequeda
G. Will
Affiliation:
Mineralogical Institute of Bonn University D-5300 Bonn 1, Germany
T. C. Huang
Affiliation:
IBM Research Division, Almaden Research Center, San Jose California, 95120-6099, USA
F. Sequeda
Affiliation:
IBM Research Division, Almaden Research Center, San Jose California, 95120-6099, USA
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Extract

The structural characterization of thin films is important for research development and manufacturing of electronic, magnetic, optical, and other high-tech materials. The grazing incidence X-ray diffraction technique has bean used successfully for the determination of crystalline phases, structural-depth profiles, crystallite size, and strain, etc. of thin films with thickness's down to a few tens of Å, If the crystal structure, e.g. the distribution of atoms in the unit cell, or the crystallinity and texture (or preferred orientation) of a film is of interest, the conventional Bragg-Brentano diffractometer technique with the θ-2θ scanning geometry has been found to be appropriate.

Type
III. Thin-Film and Surface Characterization by XRD
Information
Advances in X-Ray Analysis , Volume 35 , Issue A: First Pacific-International Congress on X-ray Analytical Methods (PICXAM). Fortieth Annual Conference on Applications of X-ray Analysis, August 7-16, 1991 , 1991 , pp. 151 - 157
Copyright
Copyright © International Centre for Diffraction Data 1991

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References

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