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Depth Profiling by Means of X-Ray Photoelectron Spectrometry
Published online by Cambridge University Press: 06 March 2019
Extract
The depth range d of x-ray photoelectron spectrometry (XPS) is determined by the inelastic mean free path λ of photoelectrons . The following considerations are dedicated to a correlation between d and λ.
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- XI. Thin-Film and Surface Characterization by XRS and XPS
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- Copyright © International Centre for Diffraction Data 1991