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Comparison of Inverse Laplace and Numerical Inversion Methods for Obtaining Z-Depth Profiles of Diffraction Data

Published online by Cambridge University Press:  06 March 2019

Xiaojing Zhu ,
Paul Predecki  and
Benjamin Ballard
Xiaojing Zhu
Affiliation:
Department of Engineering, University of Denver Denver CO 80208, USA
Paul Predecki
Affiliation:
Department of Engineering, University of Denver Denver CO 80208, USA
Benjamin Ballard
Affiliation:
Department of Engineering, University of Denver Denver CO 80208, USA
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Abstract

Two different inversion methods, the inverse Laplace method and the linear constrained numerical method, for retrieving the z-profiles of diffraction data from experimentally obtained τ-profiles were compared using tests with a known function as the original z-profile. Two different real data situations were simulated to determine the effects of specimen thickness and missing τ-profiles data at small τ-values on the retrieved z-profiles. The results indicate that although both methods are able to retrieve the z-profiles in the bulk specimens satisfactorily, the numerical method can be used for thin film samples as well. Missing τ-profile data at small τ values causes error in the retrieved z-profiles with both methods, particularly when the trend of the τ-profile at small τ is significantly changed because of the missing data

Type
III. Applications of Diffraction to Semiconductors and Films
Information
Advances in X-Ray Analysis , Volume 38: Forty-third Annual Conference on Applications of X-ray Analysis , 1994 , pp. 263 - 268
Copyright
Copyright © International Centre for Diffraction Data 1994

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