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Characterization of Thin Films Using XRF

Published online by Cambridge University Press:  06 March 2019

James E. Willis*
Affiliation:
Data Acquisition and Control, Inc, P.O. Box 779 Roswell, GA 30077
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Extract

Thin film samples represent ideal samples for analysis using X-ray fluorescence in that they tend to be flat, smooth and homogeneous. However, before a sample can be characterized using XRF, several questions must be answered.

Type
Research Article
Copyright
Copyright © International Centre for Diffraction Data 1989

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References

1. Pollai, G., Mantier, M., Abel, H.., Spectrochemica Acta. 26B : 747 (1971)Google Scholar
2. Mantler, M., Analytica Chimica Acta. 188 : 25 (1986)Google Scholar
3. Huang, T. C. and Parrish, W., Adv. X-ray Anal., 29 : 395 (1986)Google Scholar
4. Willis, J. E., Adv. X-ray Anal., 31 : 175 (1988)Google Scholar
5. Criss, J. W., Birks, L. S. and Gilfrich, J. V., Anal. Chem. 50 : 33 (1978)Google Scholar
6. Willis, J. E., X-ray Spectrometry. 18-#4 : 143 (1989)Google Scholar