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Characterization of PZT Thin Films Crystallographic Phases

Published online by Cambridge University Press:  06 March 2019

Raymond P. Goehner ,
Michael O. Eatough ,
Bruce A. Tuttle  and
Thomas J. Headley
Raymond P. Goehner
Affiliation:
Sandia National Laboratories Albuquerque, New Mexico, 87185-5800
Michael O. Eatough
Affiliation:
Sandia National Laboratories Albuquerque, New Mexico, 87185-5800
Bruce A. Tuttle
Affiliation:
Sandia National Laboratories Albuquerque, New Mexico, 87185-5800
Thomas J. Headley
Affiliation:
Sandia National Laboratories Albuquerque, New Mexico, 87185-5800
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Abstract

The use of grazing incidence parallel beam x-ray diffraction (GIXRD) in the characterization of lead zirconate titanate (PZT) films is described. This tool has enabled us to depth profile the films. The transmission electron microscopy (TEM) results obtained from a cross section of one film are shown to compliment the GIXRD results. The variation in crystallographic structure versus depth in the film was the primary focus of this study.

The insults from three PZT films having Zr/Ti ratios of 25/75, 48/52, and 75/25 are given. TEM results are reported from the sample with a Zr/Ti ratio of 48/52.

Type
III. Thin-Film and Surface Characterization by XRD
Information
Advances in X-Ray Analysis , Volume 35 , Issue A: First Pacific-International Congress on X-ray Analytical Methods (PICXAM). Fortieth Annual Conference on Applications of X-ray Analysis, August 7-16, 1991 , 1991 , pp. 159 - 167
Copyright
Copyright © International Centre for Diffraction Data 1991

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