Hostname: page-component-586b7cd67f-2plfb Total loading time: 0 Render date: 2024-11-23T14:47:40.028Z Has data issue: false hasContentIssue false
  • English
  • Français

Basic Studies of Multi-Layer Thin Film Analysis Using Fundamental Parameter Method

Published online by Cambridge University Press:  06 March 2019

Y. Kataoka  and
T. Arai
Y. Kataoka
Affiliation:
Rigaku Industrial Corporation Osaka, Japan
T. Arai
Affiliation:
Rigaku Industrial Corporation Osaka, Japan
Get access

Extract

X-ray fluorescence analysis is the most suitable method, for the characterization of the thickness and the chemical composition of thin film samples. It is non-destructive, rapid, precise, and accurate for both metal and oxide samples.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 33: Thirty-Eighth Annual Conference on Applications of X-ray Analysis, July 31 - August 4, 1989 , 1989 , pp. 213 - 223
Copyright
Copyright © International Centre for Diffraction Data 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Laguitton, D. and Mantler, M., Adv. X-ray Anal., 20 (1977), p. 515 Google Scholar
2. Laguitton, D. and Parrish, W., Anal. Chem., 49 (1977), p. 1152 Google Scholar
3. Huang, T. C. and Parrish, W., Adv. X-ray Anal., 29 (1986), p. 395 Google Scholar
4. Shiraiwa, T. and Fujino, N., Japan J. Appl. Phys., 5 (1966), p. 886 Google Scholar
5. Ohno, K., Fujiwara, J. and Morimoto, I., X-ray Spectrum, 9 (1980) p.138 Google Scholar
6. Pella, P. A., Feng, L. and Small, J. A., X-ray Spectrum, 14 (1985) p.125 Google Scholar
7. Criss, J. W., Adv. X-ray Anal., 23. (1980), p.93 Google Scholar
8. Ochi, H. and Okashita, H., Shiraazu Rev., 45 (1988), p. 51 Google Scholar
9. Tertian, R. and Broil, N., X-ray Spectrum, 13 (1984), p. 134 Google Scholar