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Auger Electron Emission Micrography and Microanalysis of Solid Surfaces

Published online by Cambridge University Press:  06 March 2019

K. Hayakawa ,
H. Okano ,
S. Kawase  and
S. Yamamoto
K. Hayakawa
Affiliation:
Central Research Laboratory, Hitachi Ltd, Kokubunji, Tokyo 185, Japan
H. Okano
Affiliation:
Central Research Laboratory, Hitachi Ltd, Kokubunji, Tokyo 185, Japan
S. Kawase
Affiliation:
Central Research Laboratory, Hitachi Ltd, Kokubunji, Tokyo 185, Japan
S. Yamamoto
Affiliation:
Central Research Laboratory, Hitachi Ltd, Kokubunji, Tokyo 185, Japan
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Abstract

An electron probe Auger emission microanalyzer has been constructed. The instrument is composed of an electromagnetic focussing primary probe column and a cylindrical mirror electron energy analyzer. By using this instrument, Auger electron spectroscopy studies have been carried out in the modes of both emission microanalysis and emission micrograph. The feasibility o£ this method is investigated through its application to the study of iron surface.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 17: Twenty-Second Annual Conference on Applications of X-ray Analysis, August 22-24, 1973 , 1973 , pp. 498 - 508
Copyright
Copyright © International Centre for Diffraction Data 1973

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References

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