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An Integrated System for Elemental X-Ray Analysis of Materials

Published online by Cambridge University Press:  06 March 2019

J.C. Russ ,
A.O. Sandborg ,
M.W. Barnhart ,
C.E. Soderquist ,
R.W. Lichtinger  and
C.J. Walsh
J.C. Russ
Affiliation:
EDAX Int'l, Inc., Prairie View, Illinois
A.O. Sandborg
Affiliation:
EDAX Int'l, Inc., Prairie View, Illinois
M.W. Barnhart
Affiliation:
EDAX Int'l, Inc., Prairie View, Illinois
C.E. Soderquist
Affiliation:
EDAX Int'l, Inc., Prairie View, Illinois
R.W. Lichtinger
Affiliation:
EDAX Int'l, Inc., Prairie View, Illinois
C.J. Walsh
Affiliation:
EDAX Int'l, Inc., Prairie View, Illinois
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Extract

The use of energy dispersive analysis of x-rays (EDAX method) is now well entrenched in the electron column field(l), where more scanning electron microscopes have been fitted with EDAX instrumentation than all of the conventional (wavelength-dispersive spectrometer) microprobes ever made. The principle advantage of the EDAX approach for the SEM user is the efficiency of detection, which permits its use at the low power levels of the SEM. In addition, the simultaneous analysis of the entire spectrum and the lack of focusing restrictions that permits analysis of rough samples are important advantages.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 16: 'Twenty-First Annual Conference on Applications of X-ray Analysis, August 2-4, 1972 , 1972 , pp. 284 - 297
Copyright
Copyright © International Centre for Diffraction Data 1972

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References

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