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  • Cited by 80
  • Edited by Stepan Lucyszyn, Imperial College of Science, Technology and Medicine, London
Publisher:
Cambridge University Press
Online publication date:
February 2014
Print publication year:
2010
Online ISBN:
9780511781995

Book description

An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. Reviews RF MEMS technologies Illustrates new techniques that solve long-standing problems associated with reliability and packaging Provides the information needed to incorporate RF MEMS into commercial products Describes current and future trends in RF MEMS, providing perspective on industry growth Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation

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