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5 - Single-frequency capacitively coupled plasmas

Published online by Cambridge University Press:  04 April 2011

Pascal Chabert  and
Nicholas Braithwaite
Pascal Chabert
Affiliation:
Ecole Polytechnique, Paris
Nicholas Braithwaite
Affiliation:
The Open University, Milton Keynes
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Physics of Radio-Frequency Plasmas , pp. 131 - 175
Publisher: Cambridge University Press
Print publication year: 2011

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