Book contents
- Frontmatter
- Contents
- Acknowledgements
- 1 Introduction
- 2 Plasma dynamics and equilibrium
- 3 Bounded plasma
- 4 Radio-frequency sheaths
- 5 Single-frequency capacitively coupled plasmas
- 6 Multi-frequency capacitively coupled plasmas
- 7 Inductively coupled plasmas
- 8 Helicon plasmas
- 9 Real plasmas
- 10 Electrical measurements
- Appendix: Solutions to exercises
- References
- Index
1 - Introduction
Published online by Cambridge University Press: 04 April 2011
- Frontmatter
- Contents
- Acknowledgements
- 1 Introduction
- 2 Plasma dynamics and equilibrium
- 3 Bounded plasma
- 4 Radio-frequency sheaths
- 5 Single-frequency capacitively coupled plasmas
- 6 Multi-frequency capacitively coupled plasmas
- 7 Inductively coupled plasmas
- 8 Helicon plasmas
- 9 Real plasmas
- 10 Electrical measurements
- Appendix: Solutions to exercises
- References
- Index
Summary
Plasmas
A plasma is an ionized gas containing freely and randomly moving electrons and ions. It is usually very nearly electrically neutral, i.e., the negatively charged particle density equals the positively charged particle density to within a fraction of a per cent. The freedom of the electric charges to move in response to electric fields couples the charged particles so that they respond collectively to external fields; at low frequencies a plasma acts as a conductor but at sufficiently high frequencies its response is more characteristic of a dielectric medium. When only weakly ionized (the most common situation for industrial applications) a plasma also contains neutral species such as atoms, molecules and free radicals. Most of this book is about weakly ionized plasmas that have been generated at low pressure using radio-frequency (RF) power sources.
Plasma is by far the most common condition of visible matter in the universe, both by mass and by volume. The stars are made of plasma and much of the space between the stars is occupied by plasma. There are big differences between these plasmas: the cores of stars are very hot and very dense whereas plasmas in the interstellar medium are cold and tenuous. Similar contrasts also apply to artificially produced plasmas on Earth: there are hot dense plasmas and colder less dense plasmas.
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- Physics of Radio-Frequency Plasmas , pp. 1 - 17Publisher: Cambridge University PressPrint publication year: 2011
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