7 results
Measurement of Interactions between Abrasive Silica Particles and Copper, Titanium, Tungsten and Tantalum
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- Journal:
- MRS Online Proceedings Library Archive / Volume 991 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0991-C05-03
- Print publication:
- 2007
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AFM Measurements of Adhesion between CMP Slurry Particles and Copper
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F12-05
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- 2006
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AFM Measurements of Adhesion between Actual CMP Slurry Particles and Various Substrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W2.5
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- 2005
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Effect of Particle Interaction on Agglomeration of Silica-Based CMP Slurries
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- Journal:
- MRS Online Proceedings Library Archive / Volume 816 / 2004
- Published online by Cambridge University Press:
- 15 March 2011, K4.9
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- 2004
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Pad Degradation During CMP Process: Effect of Soak in Slurry and Water on Thermal and Mechanical Properties of the CMP Pads
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- Journal:
- MRS Online Proceedings Library Archive / Volume 767 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, F2.6
- Print publication:
- 2003
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Advances in Characterization of CMP Consumables
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- Journal:
- MRS Bulletin / Volume 27 / Issue 10 / October 2002
- Published online by Cambridge University Press:
- 31 January 2011, pp. 766-771
- Print publication:
- October 2002
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Effect of CMP Pad Exposure to Aqueous Media on the Pad Properties. Part 1. Dynamic Mechanical and Modulated DSC Analysis
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- Journal:
- MRS Online Proceedings Library Archive / Volume 732 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, I5.4
- Print publication:
- 2002
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