4 results
Improved Abruptness of Si/Sin Interface by ArF Excimer-Laser Pre-Annealing to Sin
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- Journal:
- MRS Online Proceedings Library Archive / Volume 345 / 1994
- Published online by Cambridge University Press:
- 15 February 2011, 105
- Print publication:
- 1994
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Low-Temperature Chemical-Vapor-Deposition of Silicon-Nitride from Tetra-Silane and Hydrogen Azide
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- Journal:
- MRS Online Proceedings Library Archive / Volume 284 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 3
- Print publication:
- 1992
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A-Si FETs With Improved On/Off Characteristics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 149 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 247
- Print publication:
- 1989
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Vertical-Type a-Si:H Field-Effect Transistors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 33 / 1984
- Published online by Cambridge University Press:
- 21 February 2011, 287
- Print publication:
- 1984
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