2 results
Lithographical bending control method for a piezoelectric actuator
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- Journal:
- International Journal of Microwave and Wireless Technologies / Volume 1 / Issue 1 / February 2009
- Published online by Cambridge University Press:
- 06 March 2009, pp. 37-42
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Surface Cleaning for Silicon Epitaxy Using Photoexcited Fluorine Gas
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- Journal:
- MRS Online Proceedings Library Archive / Volume 318 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 269
- Print publication:
- 1993
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- Article
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