2 results
Variation of crystal quality and residual stresses in epitaxially grown thin film systems induced by ion implantation and annealing
-
- Journal:
- Journal of Materials Research / Volume 28 / Issue 11 / 14 June 2013
- Published online by Cambridge University Press:
- 14 May 2013, pp. 1413-1419
- Print publication:
- 14 June 2013
-
- Article
- Export citation
Effects of misfit dislocation and film-thickness on the residual stresses in epitaxial thin film systems: Experimental analysis and modeling
-
- Journal:
- Journal of Materials Research / Volume 27 / Issue 21 / 14 November 2012
- Published online by Cambridge University Press:
- 28 September 2012, pp. 2737-2745
- Print publication:
- 14 November 2012
-
- Article
- Export citation