10 results
Oxide Removal on Silicon by Rapid Thermal Processing Using SiH2CI2 and H2
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- Journal:
- MRS Online Proceedings Library Archive / Volume 342 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 243
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- 1994
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Deposition of Microcrystalline Si,Ge (µc-Si,Ge) Alloys by Reactive Magnetron Sputtering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 358 / 1994
- Published online by Cambridge University Press:
- 28 February 2011, 781
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- 1994
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Gate Quality Oxides Prepared by Rapid Thermal Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 334 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 531
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- 1993
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Electron Microscopy Studies of Undoped and Phosphorus Doped Si:H and Si,C:H Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 297 / 1993
- Published online by Cambridge University Press:
- 01 January 1993, 711
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- 1993
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Fabrication of Ultra-Shallow P+-N and N+-P Junctions by Diffusion From Selectively Deposited, Ion-Implanted and In-Situ Doped Si0.7Ge0.3
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- Journal:
- MRS Online Proceedings Library Archive / Volume 303 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 31
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- 1993
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Dislocation Behaviour in GexSi1-x Epilayers on (001)Si
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- Journal:
- MRS Online Proceedings Library Archive / Volume 160 / 1989
- Published online by Cambridge University Press:
- 28 February 2011, 71
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- 1989
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Dislocation Nucleation in GeSi/Si(100) Strained Epilayers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 138 / 1988
- Published online by Cambridge University Press:
- 28 February 2011, 397
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- 1988
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The Kinetics and Microstructure of Ion Beam Induced Crystallisation of Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 45 / 1985
- Published online by Cambridge University Press:
- 25 February 2011, 79
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- 1985
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Kinetics, Microstructure And Mechanisms of Ion Beam Induced Epitaxial Crystallization of Semiconductors.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 51 / 1985
- Published online by Cambridge University Press:
- 26 February 2011, 319
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- 1985
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Rapid Thermal Annealing in Si
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- Journal:
- MRS Online Proceedings Library Archive / Volume 35 / 1984
- Published online by Cambridge University Press:
- 25 February 2011, 329
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- 1984
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