3 results
Determination of the Planarization Distance for Copper CMP Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 566 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 211
- Print publication:
- 1999
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Chemical Mechanical Cleaning for Post-CMP Applications: Defects and Metals Results
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- Journal:
- MRS Online Proceedings Library Archive / Volume 477 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 137
- Print publication:
- 1997
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- Article
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Electrical Characterization of Some Native Insulators on Germanium
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- Journal:
- MRS Online Proceedings Library Archive / Volume 76 / 1986
- Published online by Cambridge University Press:
- 25 February 2011, 307
- Print publication:
- 1986
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- Article
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