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Enhanced Diffusion in Silicon Processing
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- Journal:
- MRS Bulletin / Volume 25 / Issue 6 / June 2000
- Published online by Cambridge University Press:
- 31 January 2011, pp. 39-44
- Print publication:
- June 2000
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Atomistic Modeling of Complex Silicon Processing Scenarios
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- Journal:
- MRS Online Proceedings Library Archive / Volume 610 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, B11.1
- Print publication:
- 2000
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Low Resistivity CoSi2 Surface Layers for Use as Contacts in CMOS Processes
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- Journal:
- MRS Online Proceedings Library Archive / Volume 224 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 109
- Print publication:
- 1991
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