Symposium GG – Microelectromechanical Systems–Materials and Devices II
Research Article
Microfabrication of Si/SiO2–Spherical Shells as a Path to Sub-mm3 Autonomous Robotic Systems
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- Published online by Cambridge University Press:
- 01 February 2011, 1139-GG03-43
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Dicing of Fragile MEMS Structures
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- Published online by Cambridge University Press:
- 01 February 2011, 1139-GG01-09
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Controlling the Wrinkling of the Bilayer Thin Films Electrothermally
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- Published online by Cambridge University Press:
- 01 February 2011, 1139-GG03-20
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