Analytical and Instrumentation Science Symposia
Advances in Scanning Electron/Ion Instrumentation and Detectors
Abstract
Patterned Wafer Inspection with Multi-beam SEM Technology
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- 25 July 2016, pp. 586-587
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Towards Enhancing the Throughput and Eliminating the 4 Dimensions of Stitching Errors in Large Area, High Resolution SEM for Integrated Circuit Reverse Engineering and Connectomics
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- 25 July 2016, pp. 588-589
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IPrep – Automated Serial-Section Broad-Ion-Beam Tomography
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- 25 July 2016, pp. 590-591
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Silicon Photomultipliers: Properties, Latest Developments at FBK and Applications.
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- 25 July 2016, pp. 592-593
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Figure of Merit of Silicon Photomultiplier/Scintillator Electron Detector
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- 25 July 2016, pp. 594-595
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Real-World Electron Detector Performance in Scanning Electron Microscopes
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- 25 July 2016, pp. 596-597
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How New Electron Detector Concepts Can Help to Increase Throughput and Sensitivity of Single-and Multi-Beam Scanning Electron Microscopes
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- 25 July 2016, pp. 598-599
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Nanoscale Imaging of Structural and Optical Properties Using Helium Temperature Scanning Transmission Electron Microscopy Cathodoluminescence of Nitride Based Nanostructures
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- 25 July 2016, pp. 600-601
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Nanoscale Cathodoluminescence of an InGaN Single Quantum Well Intersected by Individual Dislocations
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- 25 July 2016, pp. 602-603
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STEM/SEM, Chemical Analysis, Atomic Resolution and Surface Imaging At ≤ 30 kV with No Aberration Correction for Nanomaterials on Graphene Support
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- 25 July 2016, pp. 604-605
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Is It Possible to Image the Auger Electron Signal in a Conventional SEM Using a Segmented Annular BSED and Stage Bias?
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- 25 July 2016, pp. 606-607
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Comparison of Secondary, Backscattered and Low Loss Electron Imaging for Dimensional Measurements in the Scanning Electron Microscope - Part 2
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- 25 July 2016, pp. 608-609
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New Methods for Measuring Chemistry and Temperature Using Scanning Ion and Electron Beams
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- 25 July 2016, pp. 610-611
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Hydrogen Ion Beams from Nanostructured Gas Field Ion Sources
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- 25 July 2016, pp. 612-613
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Novel Scanning Ion Microscope with H3+ Gas Field Ionization Source
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- 25 July 2016, pp. 614-615
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Reactive Gas Ion Beam Generation Using Single Atom W(111) Gas Field Ion Sources
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- 25 July 2016, pp. 616-617
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Nanometer Scale Time of Flight Back Scattering Spectrometry in the Helium Ion Microscope
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- 25 July 2016, pp. 618-619
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Image Simulation and Analysis to Predict the Sensitivity Performance of a Multi-Electron Beam Wafer Defect Inspection Tool
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- 25 July 2016, pp. 620-621
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Design of a HAADF Detector for Z Contrast in SEM
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- 25 July 2016, pp. 622-623
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A Combination BSE and CL Detector using Silicon Photomultipliers
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- 25 July 2016, pp. 624-625
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