This study described a low-energy atom scattering system combined with a time-of-flight spectrometer and an ultra high vacuum chamber for insulator surface structural analysis. We show one of examples to study of MgO(111) surface analysis. A visual image of Mg atoms due to the projected blocking pattern represents the crystalline structure of the MgO(111) surfaces. This figure shows the trajectory of scattered 4He0 particles due to Mg atoms along low-index lattice planes and crystallographic directions. Insulator surface structural analysis becomes more important in materials sciences.

This study describes a low-energy atom scattering system that was combined with a time-of-flight spectrometer for insulator surface structural analysis. We show one example. MgO(001) crystal was used to study the surface analysis technique and is illustrated here. Insulator surface structure is difficult to study because of the charging effects during electron or ion-beam bombardment. Nevertheless, structural analysis of insulator surfaces is very important in fundamental research as well as in technology fields.

Thin films of 8 mol% yttria-stabilized zirconia (YSZ) of thickness ranging from 15nm-500nm have been deposited on Si3N4(90nm)/Si substrates by RF sputtering at room temperature. These samples have been studied using in situ ion scattering techniques including Rutherford backscattering spectrometry (RBS) and nuclear reaction analysis (NRA) to analyze the oxygen distribution and defect chemistry as a function of annealing in various oxidizing and reducing ambient upto 500°C. In addition, the structural quality of these films after long time annealing has been investigated using grazing incidence X-ray diffraction (GIXRD). Temperature dependent X-ray absorption spectroscopy (XAS) has been performed to study the unoccupied density of states and chemical nature of YSZ. In this paper, we will discuss in detail the effects of annealing in different ambient on the defect chemistry, structure and stability of films in these materials systems.

Generation of extreme ultraviolet (EUV) light for nanolithography requires the use of hot, dense plasmas. Gas discharge produced plasma (GDPP) and laser produced plasma (LPP) are the primary configurations used to generate these plasmas. Both GDPP and LPP collector mirror systems face serious issues regarding lifetime and EUV light reflectivity performance. For both configurations debris, fast ions, fast neutrals, and condensable EUV radiator fuels (Li, Sn) interact with nearby collector mirrors. Sn, in particular is used due to its high conversion efficiency in the 13.5-nm in-band spectrum. In addition to debris, collector mirrors are exposed to impurities (H,C,O,N), off-band radiation (depositing heat) and highly-charged ions leading to their degradation and consequently limiting 13.5 nm light reflection intensity.

This work presents results of Ru and Rh-based collector optics irradiated by Sn ions between at 1.3 keV and exposed to Sn thermal atoms at room temperature. In-situ metrology monitors the effects of ion implantation on ion-induced erosion and EUV reflectivity changes using low-energy ion scattering spectroscopy and X-ray photoelectron spectroscopy. Results find that Sn implants at the first few monolayers leading to a mixed layer at the surface. Sn thermal atoms deposit on top of the mirror surface leading to 10-20% loss of collector mirror EUV light reflectivity.

Pd deposits on Ni(111) have been studied by low energy ion scattering spectroscopy. We found that two different types of epitaxial growth exist: Pd[11 2]//Ni[11 2] and Pd[11 2]//Ni[11 2] at substrate temperature of 300 K. The Pd(111) planes grow as mixed domains of 50 % each. Surface alloying of the Pd-Ni system was confirmed for deposition at 300 K in which Pd atoms displace first-layer Ni atoms, with an outward displacement of 0.4 Å with respect to first layer Ni atoms.

We have been developing a low energy Ne atom scattering system combined with a time-of-flight spectrometer for insulator surface structural analysis. Insulator surface structure is difficult to study because of charging effects during electron or ion beam bombardment. Structural analyses of insulator surfaces are very important in fundamental research as well as technology fields. In our system, charged ion beams of 2 keV-Ne+ are converted into neutral beams by charge exchange with the same element gas after the primary beam passes through a chopper. Other features of this system are pulsed beams, time-of-flight measurements, and a micochannel plate (MCP) detector is coaxially mounted along the primary beam. This is a home made equipment. We will show the detection systems, as well.