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1 results

  • An Study of Influence of Imperfections on the Delamination of Diamond-Like Carbon Films

  • Myoung-Woon Moon, Kyang-Ryel Lee, Jin-Won Chung, Kyu Hwan Oh
  • Journal:
    MRS Online Proceedings Library Archive / Volume 719 / 2002
    Published online by Cambridge University Press:
    01 February 2011, F8.36
    Print publication:
    2002

  • The role of imperfections on the initiation and propagation of interface delaminations in compressed thin films has been analyzed using experiments with diamond-like carbon (DLC) films deposited onto glass substrates. The surface topologies and interface separations have been characterized by using the Atomic Force Microscope (AFM) and the Focused Ion Beam (FIB) imaging system. The lengths and amplitudes of numerous imperfections have been measured by AFM and the interface separations characterized on cross sections made with the FIB. Chemical analysis of several sites, performed using Auger Electron Spectroscopy (AES), has revealed the origin of the imperfections. The incidence of buckles has been correlated with the imperfection length.