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Simultaneous Occurrence of Multiphases in the Interfacial Reactions of Ultrahigh Vacuum Deposited Ti, Hf and Cr Thin Films on (111)Si
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- Journal:
- MRS Online Proceedings Library Archive / Volume 311 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 323
- Print publication:
- 1993
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- Article
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