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Dielectric Gradient Force Actuation with on-chip electrode and Free-Space Optical Measurement of SiNx Nanomechanical Resonator
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1424 / 2012
- Published online by Cambridge University Press:
- 30 March 2012, mrsf11-1424-ss15-52
- Print publication:
- 2012
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- Article
- Export citation