3 results
Low Temperature Deposition of Polycrystalline Silicon thin Films by Hot-Wire CVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 377 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 69
- Print publication:
- 1995
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Hot Filament Assisted CVD of Titanium Nitride Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 327 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 115
- Print publication:
- 1993
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Strong Visible Photoluminescence in Silicon Nitride thin Films Deposited at High Rates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 325 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 177
- Print publication:
- 1993
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