1 results
Feasibility of Detecting Barrier Layer to Low-k Transition in Copper Cmp Using Raman Spectroscopy
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W2.4
- Print publication:
- 2005
-
- Article
- Export citation