2 results
Investigation and Modeling of Fluorine Co-Implantation Effects on Dopant Redistribution
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 765 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, D6.15
- Print publication:
- 2003
-
- Article
- Export citation
The Impact of Point Defects on Stress-Induced Dislocation Generation in Silicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 610 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, B6.13
- Print publication:
- 2000
-
- Article
- Export citation