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Surface Treatment with UV-Excited Radicals for Highly-Reliable Gate Dielectrics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 473 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 131
- Print publication:
- 1997
-
- Article
- Export citation
Surface Treatment with UV-Excited Radicals for Highly-Reliable Gate Dielectrics
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 477 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 71
- Print publication:
- 1997
-
- Article
- Export citation