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Chemical Vapor Deposition of Ruthenium Dioxide Thin Films From Bis(2, 4-Dimethylpentadienyl)Ruthenium
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- Journal:
- MRS Online Proceedings Library Archive / Volume 495 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 75
- Print publication:
- 1997
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- Article
- Export citation