2 results
Efficacy of Damage Annealing in Advanced Ultra-Shallow Junction Processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1070 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1070-E04-03
- Print publication:
- 2008
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- Article
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Millisecond Annealing: Past, Present and Future
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- Journal:
- MRS Online Proceedings Library Archive / Volume 912 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0912-C01-01
- Print publication:
- 2006
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- Article
- Export citation