2 results
Effect of pre- and postepitaxial deposition annealing on oxygen precipitation in silicon
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- Journal:
- Journal of Materials Research / Volume 1 / Issue 5 / October 1986
- Published online by Cambridge University Press:
- 31 January 2011, pp. 698-704
- Print publication:
- October 1986
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- Article
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Internal gettering heat treatments and oxygen precipitation in epitaxial silicon wafers
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- Journal:
- Journal of Materials Research / Volume 1 / Issue 5 / October 1986
- Published online by Cambridge University Press:
- 31 January 2011, pp. 693-697
- Print publication:
- October 1986
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- Article
- Export citation