4 results
A High Performance Submicrometer CMOS/SOI Technology Using Ultrathin Silicon Films on Simox
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- Journal:
- MRS Online Proceedings Library Archive / Volume 107 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 349
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- 1987
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Solid Phase Epitaxial Recrystallization of Sos, with Applications to Submicrometer Cmos and Bipolar Devices
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- Journal:
- MRS Online Proceedings Library Archive / Volume 53 / 1985
- Published online by Cambridge University Press:
- 28 February 2011, 121
- Print publication:
- 1985
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High-Quality Boron and BF2+-Implanted P+ Junctions in Si Using Solid Phase Epitaxy and Transient Annealing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 35 / 1984
- Published online by Cambridge University Press:
- 25 February 2011, 367
- Print publication:
- 1984
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Characterization of CMOS Devices in 0.5-μm Silicon-On-Sapphire Films Modified by Solid Phase Epitaxy and Regrowth (Spear)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 33 / 1984
- Published online by Cambridge University Press:
- 21 February 2011, 35
- Print publication:
- 1984
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