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4 - Radio-frequency sheaths
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- Physics of Radio-Frequency Plasmas
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- 24 February 2011, pp 96-130
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Acknowledgements
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- 24 February 2011, pp vii-viii
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3 - Bounded plasma
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- 24 February 2011, pp 59-95
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Frontmatter
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Contents
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Appendix: Solutions to exercises
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- 24 February 2011, pp 368-374
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Index
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- 24 February 2011, pp 383-385
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1 - Introduction
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References
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- 24 February 2011, pp 375-382
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6 - Multi-frequency capacitively coupled plasmas
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- 24 February 2011, pp 176-218
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7 - Inductively coupled plasmas
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- 24 February 2011, pp 219-259
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5 - Single-frequency capacitively coupled plasmas
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- 24 February 2011, pp 131-175
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8 - Helicon plasmas
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- 24 February 2011, pp 260-286
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2 - Plasma dynamics and equilibrium
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- 24 February 2011, pp 18-58
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9 - Real plasmas
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- 24 February 2011, pp 287-317
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10 - Electrical measurements
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- 24 February 2011, pp 318-367
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Physics of Radio-Frequency Plasmas
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- 24 February 2011