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Evaluation of the Electromigration Performance of New Aluminium Via Plug-Fill Techniques for 0.25μm and 0.18μm Technologies
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- Journal:
- MRS Online Proceedings Library Archive / Volume 516 / January 1998
- Published online by Cambridge University Press:
- 10 February 2011, 305
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- January 1998
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Oxidation of Silicon and Nitridaticn of SiO2 by Rapid Thermal Processes
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- Journal:
- MRS Online Proceedings Library Archive / Volume 92 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 147
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- 1987
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Conventional and Rapid Thermal Annealing of Paramagnetic Oxygen Vacancy Defects (E'1 Centers) in Ion Implanted Amorphous SiO2: A Uni-Molcular Recombination Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 45 / 1985
- Published online by Cambridge University Press:
- 25 February 2011, 355
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- 1985
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