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Low Temperature Deposition of Si-based Thin Films on Plastic Films Using Pulsed-Discharge PECVD under Near Atmospheric Pressure
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1066 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1066-A05-05
- Print publication:
- 2008
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- Article
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