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Ion Assisted ETP-CVD a-Si:H at Well Defined Ion Energies
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1153 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1153-A17-06
- Print publication:
- 2009
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- Article
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Manipulating the Hydrogen-Bonding Configuration in ETP-CVD a-Si:H
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- Journal:
- MRS Online Proceedings Library Archive / Volume 989 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0989-A22-04
- Print publication:
- 2007
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- Article
- Export citation