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Bi-Directional Motion Achieved with a Surface Micromachined Electrothermal MEMS Microengine
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- Journal:
- MRS Online Proceedings Library Archive / Volume 785 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, D11.7
- Print publication:
- 2003
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Design and Performance of a Microengine Realized with Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators
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- Journal:
- MRS Online Proceedings Library Archive / Volume 741 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, J5.3
- Print publication:
- 2002
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Surface Micromachined Polysilicon Components Containing Continuous Hinges and Microrivets Used to Realize Three-Dimensional MEMS Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 687 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, B5.1
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- 2001
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Asymmetrical Polysilicon Electrothermal Microactuators for Achieving Large In-Plane Mechanical Forces and Deflections
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- Journal:
- MRS Online Proceedings Library Archive / Volume 657 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, EE5.34
- Print publication:
- 2000
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