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Tailoring of the Nitrogen Profile in Thin Gate Oxides Using Substrate Nitridation by Nitric Oxide
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- Journal:
- MRS Online Proceedings Library Archive / Volume 532 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 159
- Print publication:
- 1998
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- Article
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Study of Nitrogen Incorporation in Gate Oxides Using the Resistance to Oxidation Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 429 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 251
- Print publication:
- 1996
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- Article
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